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Semiconductor Processing

Semiconductor Processing
Successful semiconductor processing depends on the quality of the silicon wafer. Accurate temperature measurement is critical to the quality and yield of the wafer production process.

Inadequate control of wafer temperature can result in a substandard product and significant costs from lost revenues. Contact methods may interfere with the process, while non-contact methods must account for wafer emissivity.

LAND is the acknowledged leader in temperature measurement solutions. Our non-contact solutions provide accurate, reliable results without interfering with the highly-sterile conditions required for semiconductor manufacture. Advanced signal processing solutions compensate for emissivity and other factors which may affect accuracy.
  • Applications +

    • Solar
      Solar

      AMETEK Land provides the high-quality, non-contact temperature measurement required to deliver high-purity polysilicon. This ensures the necessary quality for solar cells.

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    • Application Czochralski Process
      Czochralski Process

      Using digital image processing, the liquid/solid boundary can be accurately monitored without careful aiming and avoiding spurious measurements from misaligned or de-focused pyrometers.

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    • Application Photovoltaic Module Assembly
      Photovoltaic Module Assembly

      The AMETEK Land LSP-HD Linescanner system provides market leading resolution and speed resulting in the most detailed and informative thermal images, so you can detect even the smallest defects.

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    • Application Polysilicon Ingot Casting
      Polysilicon Ingot Casting

      Non-contact infrared temperature management provides the easiest and most convenient technology platform for control of the polysilicon casting solidification process.

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    • Solar - Polysilicon Reactors
      Polysilicon Reactors

      Reactor temperature control is critical to delivering high-purity polysilicon for use in solar cells. AMETEK Land’s recommended solution for this application is the SPOT R100 fibre-optic thermometer.

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  • Documentation +